E15600 - SEMI E156 - 搬送インタフェースに対する450 mm AMHSストッカーの機械的仕様 Revision:SEMI E156-0710 - Superseded Such impurities may be introduced

Such impurities may be introduced into the wafer during manufacture or during various processing steps

HSMS is intended as an alternative to SEMI E4 (SECS-I) for applications where higher speed communication is needed or when a simple point-to-point topology is insufficient

The test methods described can also be used by semiconductor manufacturers to check the performance of equipment and to verify its conformance with procurement specifications

SEMI E33-1012 (technical revision)

E15600 - SEMI E156 - 搬送インタフェースに対する450 mm AMHSストッカーの機械的仕様 Revision:SEMI E156-0710 - Superseded Such impurities may be introducedglobal Physical Interfaces & Carriers Committee2010430global Audits and Reviews Subcommittee20106www. semi. org 450 FOUP4 A: OHSFOUP1A B: OHTFOUPB2 BSEMI E154 C: OHSFOUPFOUP3C D: FOUPFOUP4D Referenced SEMI Standards SEMI E154 Mechanical Interface Specification for 450 mm Load Port SEMI E158 Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling