E10000 - SEMI E100 - Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 Inch or 230 mm Reticles Revision:SEMI E100-0302E-EN - Superseded detailed procedures for the use

detailed procedures for the use of such instruments are not included in this Test Method

However this application encounters many variables and the underlying physics is not fully understood

optical image-shearing with optical or video display

The purpose of this Document is to provide specification and guide for boron trichloride (BCl3) that are used in the semiconductor industry

E10000 - SEMI E100 - Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 Inch or 230 mm Reticles Revision:SEMI E100-0302E-EN - Superseded detailed procedures for the useNOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard specifies the Reticle SMIF Pod (RSP) used to transport and store 6 inch or 230 mm reticles in a reticle (photomask) or integrated circuit (IC) manufacturing facility. This Standard is intended to set an