F01000 - SEMI F10 - Test Method to Determine the Internal Pressure Required to Produce a Failure of a Tube Fitting Connection Made of Fluorocarbon Materials StdPbc-1021 Originally published March 2008

Originally published March 2008

Determining the root cause of TDDB results is beyond the scope of this Test Method

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SEMI P40 — Specification for Mounting Requirements and Alignment Reference Locations for Extreme Ultraviolet Mask

F01000 - SEMI F10 - Test Method to Determine the Internal Pressure Required to Produce a Failure of a Tube Fitting Connection Made of Fluorocarbon Materials StdPbc-1021 Originally published March 2008NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This method provides a uniform procedure to determine the internal pressure required to produce failure of fitting connections made of fluorocarbon materials. This method can be used to characterize tube fitting connections