E06200 - SEMI E62 - Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS) StdPbc-1223 Semiconductor factories require high levels

Semiconductor factories require high levels of power quality due to the sensitivity of equipment and process controls

This Specification defines a mechanical standard for the stationary (equipment) side of the docking flange used by PGVs

SEMI PV50-0114 (Reapproved 1220)

Most device applications require that mobile ionic charge be minimized

E06200 - SEMI E62 - Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS) StdPbc-1223 Semiconductor factories require high levelsNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard specifies the tool side of the interface between a process or metrology tool and a front opening box. This Standard is intended to set an appropriate level of specification that places minimal limits on